Chinese quartz approved for semiconductor equipment and DRAM manufacturing, but it still can’t break America’s monopoly — China secures domestic supply for chip

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Chinese quartz approved for semiconductor equipment and DRAM manufacturing, but it still can't break America's monopoly — China secures domestic supply for chip

Pacific Quartz has supplied Lam Research and Tokyo Electron with ultra-high-purity quartz consumables, such as LPCVD diffusion tubes, wafer boats, quartz ingots, quartz plates, and high-purity quartz tubes, since 2019–2020. Typically, quartz used for process equipment is 4N5 – 5N purity (~99.995–99.999% SiO 2 ). So Pacific Quartz's products are good enough for semiconductor tools.

More recently, Pacific Quartz said its quartz products manufactured from its own high-purity quartz sand passed qualification at a leading Chinese DRAM manufacturer, apparently CXMT, for use in 300-mm wafer production. This is particularly significant because it demonstrates a largely domestic supply chain for Chinese quartz that starts with Pacific Quartz's purified high-purity sand, which is then processed into semiconductor furnace-tube material that goes to a DRAM fab. While CXMT certainly uses equipment from Lam Research and Tokyo Electron, we cannot say for sure that all the quartz consumables that these tools use are made by Pacific Quartz.

Semiconductor furnace tubes are typically made from roughly 5N-class high-purity fused quartz, with stringent limits on electrically active and mobile contaminants, as they can migrate onto/into hot silicon wafers and alter transistor characteristics, ultimately creating defects and lowering yield.

CXMT's DRAM ambitions could have it capture 30% of the market by 2030

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