Perhaps the biggest changes would be required from ASML. Its High-NA EUV scanners would need modifications or a redesign to accept, clamp, move, and position the substantially larger reticles with the extreme precision required for EUV lithography.
Intel, Micron, Samsung, SK hynix, TSMC, and other chipmakers planning to adopt High-NA EUV lithography would then have to qualify the new masks, scanners, and other tools for their process flows and ensure that the full-field exposure capability works as intended.
As a result, the adoption of 6×12-inch masks would require a coordinated effort and significant investments from chipmakers, ASML, mask makers, and numerous equipment and materials suppliers.
To make matters more complicated, 6×12-inch masks will not replace the existing 6×6-inch format altogether, as noted above. The industry would therefore have to manufacture, inspect, transport, store, and handle two mask formats in parallel, which will add cost and complexity to an already expensive transition.
The transition to 6×12-inch reticles is an industry effort currently supported by ASML , Intel, Samsung, and TSMC. It is going to take years and will happen well after High-NA EUV enters high-volume manufacturing with today's 6×6-inch photomasks, as the semiconductor industry prefers to adopt new technologies gradually.
Intel already uses High-NA EUV scanner(s) for select Intel 18A layers (patterned at Fab D1X) and supports both floorplanning within the half-field and stitching; Samsung plans to introduce High-NA EUV into DRAM high-volume manufacturing by 2028, and TSMC intends to deploy the technology for advanced-node production starting in 2030. All three companies plan to start High-NA EUV adoption with 6×6-inch masks.
Intel seems to be leading the pack with 6×12-inch reticles as it has been working for three years to make them a reality, but the company remains tight-lipped about the timing of its adoption of the new photomasks. Meanwhile, the ASML-TSMC initiative targets a 6×12-inch photomask pilot line by 2031, which should provide the foundry with a platform to develop and qualify the new mask format and associated manufacturing infrastructure. The ultimate target is full lithography-system readiness for advanced-node production by 2033.
That said, 6×6-inch and 6×12-inch photomasks for High-NA EUV patterning will likely co-exist on the market at least for some time rather than undergo an abrupt transition. At the end of the day, square 6×6-inch reticles that enable High-NA EUV scanners to expose fields as large as 26×16.5 mm (or 429 mm²) should be sufficient for the vast majority of client processors produced in the coming years. Larger 6×12-inch masks will matter primarily for much bigger designs, such as high-end AI accelerators, data center CPUs, DPUs, high-end GPUs, and FPGAs, where the ability to expose a full 26×33 mm field without stitching becomes considerably more valuable.
Anton Shilov Social Links Navigation Contributing Writer Anton Shilov is a contributing writer at Tom’s Hardware. Over the past couple of decades, he has covered everything from CPUs and GPUs to supercomputers and from modern process technologies and latest fab tools to high-tech industry trends.
Key considerations
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- Volatility remains possible near catalysts
- Macro rates and liquidity can dominate flows
Reference reading
- https://www.tomshardware.com/tech-industry/semiconductors/SPONSORED_LINK_URL
- https://www.tomshardware.com/tech-industry/semiconductors/tsmc-samsung-and-intel-shore-up-support-with-asml-to-deploy-larger-high-na-euv-photomasks-6-12-inch-photomask-transition-may-take-years-despite-unified-effort#main
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